雷射設備、太陽能電池

TPR series
TPR series

Rotary platform for Solar Cell application

The TPR model is a compact machine designed for demanding fab utilization in solar cell industry,

where throughput per m2 result in best ratio. With parallel wafer processing under dual scanner,

the throughput is able to reach over 3600 wph,

lead to best investment cost $/Watt.

.BACK

• Single lane loading/unloading

• Wafer buffer magazines for loading and unloading

• Optical breakage control

• Rotary table

• Optical alignment center/edge

• Dual independent laser source

• Parallel wafer processing


TPC/TSC series
TPC/TSC series

Dual lane platform for Solar Cell application

The TPC/TSC model is the most proven laser tool with the highest capital productivity in advanced cell manufacturing.

The dual independent lanes and laser sources are flexible to handle different processes,

and able to sustain 50% throughput whenever one lane is offline for maintenance.

The linear exchange table enables high accuracy and maximum throughput.

.BACK

• Two Independent process lane

• Two independent Laser sources

• Wafer buffer magazines for loading and unloading

• Optical breakage control

• Optical alignment center/edge

• Linear exchange table